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    product center

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    產品簡介

    ASML’s PAS5000/55A, i-line wafer stepper with a 0.48NA Zeiss lens, has been the production tool for many leading 4, 5 and 6” fabs around the world for the past four decades.
    The system has a “process in-depended” alignment system, for a superior production overlay. The small footprint of roughly 1m2 makes flexible placing in most existing fabs possible.
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    ASML PAS5000/55A i-line晶圓步進光刻機的主要參數:

    • 15x15mm, 0.48NA water cooled Zeiss lens

    • Handles 4,5- or 6-inch wafers, operator changeable

    • 5-inch reticle handling

    • Direct reticle referenced, through the lens alignment system, zero-layer alignment

    • Process in-depended phase grating alignment system

    • High speed air baring wafer stage

    • Small footprint

    產品其它參數

    • 咨詢專線

      +86 21 67693080

    • 郵箱

      sales@simaxat.com

    矽萬(上海)半導體科技有限公司
    地址:上海市松江區泗磚南路255弄130號
    微信公眾號

    版權所有 ?2021 矽萬(上海)半導體科技有限公司 滬ICP備18039044號-1

    滬公網安備 31011702008159號

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